Semiconductor & Display

[ 반도체 & 디스플레이 ]

Semiconductor and display processes take place in ultra-precision cleanroom environments, where particle generation or chemical leaks have a direct impact on yield. POLY STAR supports precision processes with capsule O-rings and PEEK-based seals offering excellent chemical resistance and low particle generation.

Key Applications

Wafer transfer/chuck equipmentEtch / CVD / PVD chambersGas line valvesUltra-pure water (UPW) piping

Required Performance

1

Ultra-Low Particle Generation

Low-outgassing materials that minimize cleanroom contamination.

2

Excellent Chemical Resistance

Durable against strong acids, bases, and plasma environments without deformation.

3

Precision Dimensional Control

Micron-level tolerances that prevent minute leakage.

4

High Temperature & Vacuum Stability

Stable sealing performance under process temperature and pressure changes.

Have a semiconductor or display process spec in mind?

Share your drawings or application conditions — our team will respond promptly.

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