Semiconductor & Display

[ 반도체 & 디스플레이 ]

Semiconductor and display processes take place in ultra-precision cleanroom environments, where particle generation or chemical leaks can affect yield. Based on process gas, temperature, vacuum level, plasma exposure, and contamination-control requirements, POLY STAR reviews the applicability of Clean FKM/FFKM O-rings, PTFE machined seals, spring-energized seals, and PEEK components.

Key Applications

Wafer transfer/chuck equipmentEtch / CVD / PVD chambersGas line valvesUltra-pure water (UPW) piping

Required Performance

1

Low Particle Generation & Low Outgassing

We review compounds that reduce particle generation and outgassing in vacuum environments to minimize process contamination.

2

Excellent Chemical Resistance

Durable against strong acids, bases, and plasma environments without deformation.

3

Precision Dimensional Control

We manage seal and groove dimensions and compression ratio to reduce the risk of vacuum leakage and seal damage.

4

High Temperature & Vacuum Stability

Stable sealing performance under process temperature and pressure changes.

Have a semiconductor or display process spec in mind?

Share your drawings or application conditions — our team will respond promptly.

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