[ 반도체 & 디스플레이 ]
Semiconductor and display processes take place in ultra-precision cleanroom environments, where particle generation or chemical leaks can affect yield. Based on process gas, temperature, vacuum level, plasma exposure, and contamination-control requirements, POLY STAR reviews the applicability of Clean FKM/FFKM O-rings, PTFE machined seals, spring-energized seals, and PEEK components.
We review compounds that reduce particle generation and outgassing in vacuum environments to minimize process contamination.
Durable against strong acids, bases, and plasma environments without deformation.
We manage seal and groove dimensions and compression ratio to reduce the risk of vacuum leakage and seal damage.
Stable sealing performance under process temperature and pressure changes.
Share your drawings or application conditions — our team will respond promptly.
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